Replacement parts
Providing perfect replacement parts and system upgrades
Strict selection of quality
Strict material selection, extended service life and reduced particle impact
Efficient operation
Easy installation, reduction in maintenance workload and shortened downtime
Graphite
Other parts
Other parts
SIC
Quartz
Quartz 6”-12”Disk, Edge ring, base ring, tube, quartz ring and other spare parts
Ceramics
O-ring
Material Classification: Perfluorinated rubber (FFKM), fluoro rubber (FKM), silicone rubber (SIL), fluoro silicone rubber (FSI), etc.
Door Panel
Composite material seals
6 "-12", various spare parts such as PEEK, gaskets, composite materials, metal products, silicon etc.
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