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Replacement parts
Providing perfect replacement parts and system upgrades
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Strict selection of quality
Strict material selection, extended service life and reduced particle impact
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Efficient operation
Easy installation, reduction in maintenance workload and shortened downtime
Graphite
Other parts
Other parts
SIC
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Quartz
Quartz 6”-12”Disk, Edge ring, base ring, tube, quartz ring and other spare parts
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Ceramics
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O-ring
Material Classification: Perfluorinated rubber (FFKM), fluoro rubber (FKM), silicone rubber (SIL), fluoro silicone rubber (FSI), etc.
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Door Panel
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Composite material seals
6 "-12", various spare parts such as PEEK, gaskets, composite materials, metal products, silicon etc.
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