Technical advantages

High vacuum degree
Low leakage rate
High safety

Rigorous and complete, slot valve/process module/robot,
Hardware interlock design,
Benchmarking against international first-tier brands,
Through SemiS2 safety certification specifications and parameters.

Multifunctional customization

Supports 100/150/200/300mm wafer transmission function,
Customizes software and functions according to client requirements.

After-sales service

Local technical and service teams with quick response.

VTM300-HH600

VTM300-HH600

Product Image

VTM Drawing

Left view

Right view

Top view

Front view

Specification

Basic Power Supply AC 220V 50Hz 1500W
CDA 0.3-0.7MPa
Platform 1100mm
Wafer Size 300mm 200mm 150mm 100mm
Cleanliness Class 1
Base Vacuum 5 x 10(−8) Torr
Leak Rate <1 x 10(−9)std.cc/sec  He
Robot Model HHVRD32
Range of Motion R-axis 1050mm
Z-axis 50mm 100mm 150mm
Maximum transfer speed 1000mm/sec
Repeatability R-axis、Z-axis ± 0.05mm
T-axis 0.005°
VPA Calibration Accuracy Rotational Alignment Repeatability 0.3° (3σ) 
Centering Repeatability 0.05mm
Initial Capture Range +3.99mm
Alignment Period 3.5-4.7sec
VCE Key features Detection of laminations or oblique plates
Cassette Mapping Period 20sec