Multi-functional customization

Suitable for various layouts (2-10 load ports),
200/300mm wafer sorting machine,
Customized software and functions according to client requirements.

Fast delivery

Standard product with new stock supply,
Local manufacturer cooperation, fast delivery.

After-sales service

Local technical and service teams with quick response.

HHWS-2LP1T-11

HHWS-2LP-12W

HHWS-3LP-11

HHWS-8LP

HHWS-2LP1T-11

Product Image

Sorter Drawing

Left view

Right view

Top view

Front view

Specification

Cleanness Class 1
Robot Model Hirata AR-Wn180CL-4-T-330-2-x424
Repeatability ±0.1mm
Aligner Model Hirata KWA-12-E-A064
Alignment time less than 3.5 sec
Processing precision X-/Y-axis ±0.05 mm
W-axis ±0.03 deg
Load port Hirata KWF-12F3-M / Hirata KWF-12F3-M-R(Rotation)
Turn over HHTV
Option Wafer ID Reader/Robot Auto teaching Function/Load Port Cassette RFID Reader
Through put 280WPH(with OCR)
Weight 650 kg

HHWS-2LP-12W

Product Image

Sorter Drawing

Left view

Right view

Top view

Front view

Specification

Cleanness Class 1
Robot Model Hirata AR-Wn180CL-4-T-330-2-x424
Repeatability ±0.1mm
Aligner Model Hirata KWA-12-E-A064
Alignment time less than 3.5 sec
Processing precision X-/Y-axis ±0.05 mm
W-axis ±0.03 deg
Load port Hirata KWF-12F3-M / Hirata KWF-12F3-M-R(Rotation)
Turn over HHTV
Option Wafer ID Reader/Robot Auto teaching Function/Load Port Cassette RFID Reader
Through put 280WPH(with OCR)
Weight 650 kg

HHWS-3LP-11

Product Image

Sorter Drawing

Left view

Right view

Top view

Front view

Specification


Cleanness Class 1
Robot Model Yaskawa G124V
Repeatability ±0.1mm
Aligner Model TAZMO MAF-AAPN
Alignment time less than 4.5 sec
Processing precision XY direction (Centering) ±0.1 mm or less
T direction(notch) ±0.03 deg
Load port TDK:TAS-300 TYPE-J1
Option Wafer ID Reader/Robot Auto teaching Function/Load Port Cassette RFID Reader
Through put 300WPH(with OCR)
900WPH(without Aligner)
Weight 600 kg

HHWS-8LP

Product Image

Sorter Drawing

Left view

Right view

Top view

Front view

Specification


Cleanness Class 1
Robot Model Yaskawa G124E
Repeatability ±0.1mm
Aligner Model Yaskawa PER1130
Alignment time less than 5 sec
Processing precision XY direction ±0.1 mm or less
T direction ±0.01 deg or less
Load port TDK:TAS-300 J1
Option Wafer ID Reader/Robot Auto teaching Function/Load
Through put 300WPH(with OCR)
Weight 960 kg