
多功能定制
适用于各种布局(2~10个负载端口)
200/300mm晶圆分拣机功能
根据客户要求定制软件和功能

快速交货
标准产品新货供应
本地制造商配合,快速交货

售后服务
本地技术和服务团队快速响应

HHWS-2LP1T-11

HHWS-2LP-12W

HHWS-3LP-11

HHWS-8LP
HHWS-2LP1T-11
Product Image

Sorter Drawing

左视图

右视图

俯视图

主视图
Specification
Cleanness | Class 1 | ||
Robot | Model | Hirata AR-Wn180CL-4-T-330-2-x424 | |
Repeatability | ±0.1mm | ||
Aligner | Model | Hirata KWA-12-E-A064 | |
Alignment time | less than 3.5 sec | ||
Processing precision | X-/Y-axis | ±0.05 mm | |
W-axis | ±0.03 deg | ||
Load port | Hirata KWF-12F3-M / Hirata KWF-12F3-M-R(Rotation) | ||
Turn over | HHTV | ||
Option | Wafer ID Reader/Robot Auto teaching Function/Load Port Cassette RFID Reader | ||
Through put | 280WPH(with OCR) | ||
Weight | 650 kg |