多功能定制
适用于各种布局（2~10个负载端口）
200/300mm晶圆分拣机功能
根据客户要求定制软件和功能
快速交货
标准产品新货供应
本地制造商配合，快速交货
售后服务
本地技术和服务团队快速响应
HHWS-2LP1T-11
HHWS-2LP1T-11
HHWS-2LP1T-11
HHWS-2LP1T-11
HHWS-2LP1T-11
Product Image
Sorter Drawing
左视图
右视图
俯视图
主视图
Specification
| Cleanness | Class 1 | ||
| Robot | Model | Hirata AR-Wn180CL-4-T-330-2-x424 | |
| Repeatability | ±0.1mm | ||
| Aligner | Model | Hirata KWA-12-E-A064 | |
| Alignment time | less than 3.5 sec | ||
| Processing precision | X-/Y-axis | ±0.05 mm | |
| W-axis | ±0.03 deg | ||
| Load port | Hirata KWF-12F3-M / Hirata KWF-12F3-M-R(Rotation) | ||
| Turn over | HHTV | ||
| Option | Wafer ID Reader/Robot Auto teaching Function/Load Port Cassette RFID Reader | ||
| Through put | 280WPH(with OCR) | ||
| Weight | 650 kg | ||
HHWS-2LP-12W
Product Image
Sorter Drawing
左视图
右视图
俯视图
主视图
Specification
| Cleanness | Class 1 | ||
| Robot | Model | Hirata AR-Wn180CL-4-T-330-2-x424 | |
| Repeatability | ±0.1mm | ||
| Aligner | Model | Hirata KWA-12-E-A064 | |
| Alignment time | less than 3.5 sec | ||
| Processing precision | X-/Y-axis | ±0.05 mm | |
| W-axis | ±0.03 deg | ||
| Load port | Hirata KWF-12F3-M / Hirata KWF-12F3-M-R(Rotation) | ||
| Turn over | HHTV | ||
| Option | Wafer ID Reader/Robot Auto teaching Function/Load Port Cassette RFID Reader | ||
| Through put | 280WPH(with OCR) | ||
| Weight | 650 kg | ||
HHWS-3LP-11
Product Image
Sorter Drawing
左视图
右视图
俯视图
主视图
Specification
| Cleanness | Class 1 | ||
| Robot | Model | Yaskawa G124V | |
| Repeatability | ±0.1mm | ||
| Aligner | Model | TAZMO MAF-AAPN | |
| Alignment time | less than 4.5 sec | ||
| Processing precision | XY direction (Centering) | ±0.1 mm or less | |
| T direction（notch | ±0.03 deg | ||
| Load port | TDK：TAS-300 TYPE-J1 | ||
| Option | Wafer ID Reader/Robot Auto teaching Function/Load Port Cassette RFID Reader | ||
| Through put | 300WPH(with OCR) | ||
| 900WPH(without Allgner) | |||
| Weight | 600 kg | ||
HHWS-8LP
Product Image
Sorter Drawing
左视图
右视图
俯视图
主视图
Specification
| Cleanness | Class 1 | ||
| Robot | Model | Yaskawa G124E | |
| Repeatability | ±0.1mm | ||
| Aligner | Model | Yaskawa PER1130 | |
| Alignment time | less than 5 sec | ||
| Processing precision | XY direction | ±0.1 mm or less | |
| T direction | ±0.01 deg or less | ||
| Load port | TDK：TAS-300 J1 | ||
| Option | Wafer ID Reader/Robot Auto teaching Function/Load | ||
| Through put | 300WPH(with OCR) | ||
| Weight | 960 kg | ||