技术优势
高真空度、低漏率、高安全性
严谨完整的
slot valve/process module/robot
硬件互锁设计
通过Semi S2安全认证
规格参数对标国际一线品牌
多功能定制
支持100/150/200/300mm晶圆传送功能
根据客户要求定制软件和功能
售后服务
本地技术和服务团队快速响应
VTM300-HH600
VTM300-HH600
Product Image
VTM Drawing
左视图
右视图
俯视图
主视图
Specification
| Basic | Power Supply | AC 220V 50Hz 1500W | |
| CDA | 0.3-0.7MPa | ||
| Transport Plane | 1100mm | ||
| Wafer Size | 300mm 200mm 150mm 100mm | ||
| Cleanliness | Class 1 | ||
| Base Vacuum | 5 x 10(−8) Torr | ||
| Leak Rate | <1 x 10(−9)std.cc/sec He | ||
| Robot | Model | HHVRD32 | |
| Range of Motion | R axis | 1050mm | |
| Z axis | 50mm 100mm 150mm | ||
| Maximum transfer speed | 1000mm/sec | ||
| Repeatability | R axis、Z axis | ± 0.05mm | |
| T axis | 0.005° | ||
| VPA | Calibration Accuracy | Rotational Alignment Repeatability | 0.3° (3σ) |
| Centering Repeatability | 0.05mm | ||
| Initial Capture Range | +3.99mm | ||
| Alignment Period | 3.5-4.7sec | ||
| VCE | Key features | Detection of laminations or oblique plates | |
| Cassette Mapping Period | 20sec | ||