Semiconductor Precision Components

Replacement parts

Providing perfect replacement parts and system upgrades

Strict selection of quality

Strict material selection, extended service life and reduced particle impact

Efficient operation

Easy installation, reduction in maintenance workload and shortened downtime

Graphite

Other parts

Graphite components

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CIP Service

cip service 1

Why modifications and changes are needed:
1.Increasing in usage time: (material changes, physical changes)
2.Easy to install and use: (design changes)
3.Engineering Plan Report: (Engineering personnel propose requirements and evaluation method)

cip service 2

Modifying the original factory design from two pieces to one piece and replacing it simultaneously to reduce errors during assembly.

cip service 3

The original factory design uses spring wire and grooves to fix it, which is time-consuming to adjust and takes too long to replace. Instead, direct screws are used to fix it, saving replacement time.

cip service 4

(1) The client modified the single item originally made of TYPE-E material into a composite component and changed the internal material to TYPE-E while the outer frame used TYPE-C material, the first modification reduced costs.
(2) The second modification changed the original thickness from 8mm to 15mm which greatly improved the service life of the product.

cip service 5

Aluminium oxide modification to increase insulation length.

Specification

Graphite type
材料规格
TYPE-C TYPE-E TYPE-S
Grain size
晶粒大小(μm)
10 3 1
Thermal conductivity
热传导系数(Kcal/m.hr.oC)
70 100 -
Ash content
灰分含量(mass%)
<10ppm <10ppm <5ppm
Cte 350~450oC
热膨胀系数(*10^-6)
5.6 5.8 8.4
Bullkensity
密度(g/cm3)
1.82 1.88 1.77
Hardness
硬度(Shore)
70-76 80 100
Flexural strength
抗弯强度(kgf/cm2)
780 867 1050
Compressive strength
受压强度(kgf/cm2)
1750 1733 2100